Low-power gas sensor on nanostructured dielectric membrane
Репозиторий БНТУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
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Low-power gas sensor on nanostructured dielectric membrane
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| Автор |
Belahurov, E. A.
Khatko, V. V. Gorokh, G. G. Zakhlebayeva, A. I. Reutskaya, O. G. Taratyn, I. A. |
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| Описание |
The article presents a technology for manufacture of a gas sensor with a two-layer nanostructured dielectric membrane on a silicon substrate and its characteristics. Selection of the correct mathematical model ensures a good correlation between the experimental and calculated current-voltage characteristics of the sensor and makes it possible to evaluate the effect of porosity of the dielectric membrane on the value of the sensor’s power consumption, temperature of its sensitive layer and the related thermomechanical stresses. It demonstrates that the temperature range (150—350 °C) of the sensor’s sensitive layer, where the sensor’s response to 1 ppm CO is detected, is ensured due to power consumption from 5,0 mW up to 15,5 mW.
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| Дата |
2018-07-06T06:05:57Z
2018-07-06T06:05:57Z 2015 |
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| Тип |
Article
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| Идентификатор |
Low-power gas sensor on nanostructured dielectric membrane / E. A. Belahurov [et al.] // Нано- и микросистемная техника. – 2015. – № 6. – С. 40-42.
https://rep.bntu.by/handle/data/43572 |
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| Язык |
en
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| Охват |
Москва
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| Издатель |
Новые технологии
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