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Mechanical and tribological characteristics of a-C:H:SiOx films formed by PACVD on titanium alloy VT1-0

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Заглавие Mechanical and tribological characteristics of a-C:H:SiOx films formed by PACVD on titanium alloy VT1-0
 
Автор Grenadyorov, A. S.
Solovyev, A. A.
Oskomov, K. V.
Yaroslavtseva, O. A.
 
Тематика механические характеристики
триботехнические характеристики
пленки
титановые сплавы
плазмохимическое осаждение
импульсные напряжения
шероховатости
поверхности
 
Описание This paper is devoted to the study of the mechanical and tribological properties of aC:H:SiOx films deposited on a titanium alloy VT1-0 by a plasma chemical deposition method using pulsed bipolar bias voltage. It was shown that after deposition of 2 [mu]m-thick a-C:H:SiOx film on a titanium alloy VT1-0 sample, the root-mean-square surface roughness Rq measured using atomic force microscopy decreased from 74 to 50 nm compared to the original substrate. The surface hardness H measured using nanoindentation increased from 3.3 to 12.4 GPa with an almost unchanged elasticity modulus E. As a result, the plasticity index (H/E) of titanium samples increased from 0.03 to 0.11, and the plastic deformation resistance (H3/E2 ) increased from 3 to 156 MPa. Deposition of a-C:H:SiOx film on the titanium alloy VT1-0 surface makes possible to reduce the friction coefficient from 0.3-0.6 to 0.1 and the wear rate from 6·10-4 to 7•10{-6} mm{3} /Nm.
 
Дата 2019-08-06T07:10:07Z
2019-08-06T07:10:07Z
2019
 
Тип Conference Paper
Published version (info:eu-repo/semantics/publishedVersion)
Conference paper (info:eu-repo/semantics/conferencePaper)
 
Идентификатор Mechanical and tribological characteristics of a-C:H:SiOx films formed by PACVD on titanium alloy VT1-0 / A. S. Grenadyorov [et al.] // IOP Conference Series: Materials Science and Engineering. — Bristol : IOP Publishing, 2019. — Vol. 511 : Perspective Materials of Constructional and Medical Purpose : International Scientific and Technical Youth Conference, 26–30 November 2018, Tomsk, Russian Federation : [proceedings]. — [012019, 7 p.].
http://earchive.tpu.ru/handle/11683/55432
10.1088/1757-899X/511/1/012019
 
Язык en
 
Связанные ресурсы IOP Conference Series: Materials Science and Engineering. Vol. 511 : Perspective Materials of Constructional and Medical Purpose. — Bristol, 2019.
 
Права Open access (info:eu-repo/semantics/openAccess)
 
Издатель IOP Publishing