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Creation of thin superconducting MoCN covering by cathode sputtering technique as a basis film for functional cryogenic nanoelements

Электронный научный архив УРФУ

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Поле Значение
 
Заглавие Creation of thin superconducting MoCN covering by cathode sputtering technique as a basis film for functional cryogenic nanoelements
 
Автор Gurovich, B. A.
Goncharov, B. V.
Kutuzov, L. V.
Prihodko, K. E.
Olshansky, E. D.
 
Описание The work was supported by the NRC “Kurchatov Institute” (№1639).
 
Дата 2019-12-19T12:26:03Z
2019-12-19T12:26:03Z
2019
 
Тип Conference Paper
Conference object (info:eu-repo/semantics/conferenceObject)
Published version (info:eu-repo/semantics/publishedVersion)
 
Идентификатор Creation of thin superconducting MoCN covering by cathode sputtering technique as a basis film for functional cryogenic nanoelements / B. A. Gurovich, B. V. Goncharov, L. V. Kutuzov, K. E. Prihodko, E. D. Olshansky // Scanning Probe Microscopy. Russia-China Workshop on Dielectric and Ferroelectric Materials. Abstract Book of Joint International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2019. — P. 157.
978-5-9500624-2-1
http://elar.urfu.ru/handle/10995/79035
 
Язык en
 
Связанные ресурсы Scanning Probe Microscopy. Russia-China Workshop on Dielectric and Ferroelectric Materials. — Ekaterinburg, 2019
 
Формат application/pdf
 
Издатель Ural Federal University