The determination of mechanical properties of nanostructured tantalum nitride and tantalum oxynitride films on the glass and stainless steel surfaces by atomic force microscopy
Электронный научный архив УРФУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
| Заглавие |
The determination of mechanical properties of nanostructured tantalum nitride and tantalum oxynitride films on the glass and stainless steel surfaces by atomic force microscopy
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| Автор |
Petrovskaya, A. S.
Melnikova, G. B. Kuznetsova, T. A. Chizhik, S. A. Zykova, A. Safonov, V. |
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| Дата |
2019-12-19T12:26:08Z
2019-12-19T12:26:08Z 2019 |
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| Тип |
Conference Paper
Conference object (info:eu-repo/semantics/conferenceObject) Published version (info:eu-repo/semantics/publishedVersion) |
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| Идентификатор |
The determination of mechanical properties of nanostructured tantalum nitride and tantalum oxynitride films on the glass and stainless steel surfaces by atomic force microscopy / A. S. Petrovskaya, G. B. Melnikova, T. A. Kuznetsova, S. A. Chizhik, A. Zykova, V. Safonov // Scanning Probe Microscopy. Russia-China Workshop on Dielectric and Ferroelectric Materials. Abstract Book of Joint International Conference (Ekaterinburg, August 25-28, 2019). — Ekaterinburg, Ural Federal University, 2019. — P. 199.
978-5-9500624-2-1 http://elar.urfu.ru/handle/10995/79075 |
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| Язык |
en
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| Связанные ресурсы |
Scanning Probe Microscopy. Russia-China Workshop on Dielectric and Ferroelectric Materials. — Ekaterinburg, 2019
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| Формат |
application/pdf
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| Издатель |
Ural Federal University
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