Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
Электронный научный архив УРФУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
| Заглавие |
Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
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| Автор |
Kovalev, M.
Podlesnykh, I. Nastulyavichus, A. Stsepuro, N. Mushkarina, I. Platonov, P. Terukov, E. Abolmasov, S. Dunaev, A. Akhmatkhanov, A. Shur, V. Kudryashov, S. |
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| Тематика |
CHEMICAL ETCHING
LASER TEXTURING LIGHT-TRAPPING REFLECTION COEFFICIENT SURFACE MICROSTRUCTURES ETCHING MORPHOLOGY SILICON WAFERS SURFACE MORPHOLOGY BROADBAND LIGHT CHAOTICS CHEMICAL ETCHING CHEMICAL TREATMENTS LASER TEXTURING LASER TREATMENT LIGHT TRAPPING STRUCTURES LIGHT-TRAPPING SURFACE MICROSTRUCTURES THIN FILM SILICON REFLECTION |
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| Описание |
Light-trapping structures formed on surfaces of various materials have attracted much attention in recent years due to their important role in many applications of science and technology. This article discusses various methods for manufacturing light-trapping “black” silicon, namely laser, chemical and hybrid chemical/laser ones. In addition to the widely explored laser texturing and chemical etching methods, we develop a hybrid chemical/laser texturing method, consisting in laser post-texturing of pyramidal structures obtained after chemical etching. After laser treatments the surface morphology was represented by a chaotic relief of microcones, while after chemical treatment it acquired a chaotic pyramidal relief. Moreover, laser texturing of preliminarily chemically microtextured silicon wafers is shown to take five-fold less time compared to bare flat silicon. In this case, the chemically/laser-treated samples exhibit average total reflectance in the spectral range of 250–1100 nm lower by 7–10% than after the purely chemical treatment. © 2023 by the authors.
Ministry of Education and Science of the Russian Federation, Minobrnauka; Ministry of Science and Higher Education of the Russian Federation: 075-15-2021-677 We thank the Ural Center for Shared Use “Modern nanotechnology” of Ural Federal University (Reg.#2968), which is supported by the Ministry of Science and Higher Education RF (Project #075-15-2021-677) for the provided research equipment; and Evgeny Kuzmin from Lebedev Physical Institute for the preparation . This research was funded by the Ministry of Science and Higher Education of the Russian Federation (Ural Federal University Program of Development within the Priority-2030 Program). |
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| Дата |
2024-04-05T16:18:59Z
2024-04-05T16:18:59Z 2023 |
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| Тип |
Article
Journal article (info:eu-repo/semantics/article) |info:eu-repo/semantics/publishedVersion |
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| Идентификатор |
Kovalev, M, Podlesnykh, I, Nastulyavichus, A, Stsepuro, N, Mushkarina, I, Platonov, P, Terukov, E, Abolmasov, S, Dunaev, A, Akhmatkhanov, A, Shur, V & Kudryashov, S 2023, 'Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments', Materials, Том. 16, № 6, 2350. https://doi.org/10.3390/ma16062350
Kovalev, M., Podlesnykh, I., Nastulyavichus, A., Stsepuro, N., Mushkarina, I., Platonov, P., Terukov, E., Abolmasov, S., Dunaev, A., Akhmatkhanov, A., Shur, V., & Kudryashov, S. (2023). Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments. Materials, 16(6), [2350]. https://doi.org/10.3390/ma16062350 1996-1944 Final All Open Access, Gold, Green https://www.scopus.com/inward/record.uri?eid=2-s2.0-85151509978&doi=10.3390%2fma16062350&partnerID=40&md5=1e5bec93753518b1c1f594ea8e8add96 https://www.mdpi.com/1996-1944/16/6/2350/pdf?version=1678866072 http://elar.urfu.ru/handle/10995/130365 10.3390/ma16062350 85151509978 000959743200001 |
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| Язык |
en
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| Права |
Open access (info:eu-repo/semantics/openAccess)
cc-by https://creativecommons.org/licenses/by/4.0/ |
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| Формат |
application/pdf
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| Издатель |
MDPI
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| Источник |
Materials
Materials |
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