Protection of Cu from Oxidation by Ta Capping Layer
Электронный научный архив УРФУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
| Заглавие |
Protection of Cu from Oxidation by Ta Capping Layer
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| Автор |
Zhidkov, I. S.
Kukharenko, A. I. Milyaev, M. A. Kravtsov, E. A. Makarova, M. V. Gapontsev, V. V. Streltsov, S. V. Cholakh, S. O. Kurmaev, E. Z. |
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| Тематика |
FILMS
OXIDATION TANTALUM X-RAY REFLECTOMETRY XPS |
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| Описание |
X-ray reflectometry (XRR) and X-ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) were made of Cu thin films that were prepared and coated by capping Ta layers with different thicknesses (5, 10, 15, 20, and 30 Å), and are presented. The XRR and XPS Ta 4f-spectra revealed a complete oxidation of the protective layer up to a thickness of 10 Å. From the thickness of the capping layer of 15 Å, a pure Ta-metal line appeared in the XPS Ta 4f-spectrum, the contribution of which increased up to 30 Å. The XPS Cu 2p-spectra of the underlying copper layer revealed the oxidation with the formation of CuO up to a thickness of the Ta-layer of 10 Å. Starting from a thickness of 15 Å, the complete protection of the Cu layer against oxidation was ensured during exposure to the ambient atmosphere. © 2023 by the authors.
Ministry of Science and Higher Education of the Russian Federation: AAAA-A18-118020190098-5, AAAA-A18-118020290104-2, FEUZ-2023–0013 The obtained results were obtained in the framework of the fulfillment of the state task of the Ministry of Science and Higher Education of Russia (Project No. FEUZ-2023–0013, the Themes “Electron” grant No. AAAA-A18-118020190098-5, and the “Spin” grant No. AAAA-A18-118020290104-2). |
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| Дата |
2024-04-05T16:23:53Z
2024-04-05T16:23:53Z 2023 |
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| Тип |
Article
Journal article (info:eu-repo/semantics/article) |info:eu-repo/semantics/publishedVersion |
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| Идентификатор |
Zhidkov, IS, Kukharenko, AI, Milyaev, MA, Kravtsov, EA, Makarova, MV, Gapontsev, VV, Streltsov, SV, Cholakh, SO & Kurmaev, EZ 2023, 'Protection of Cu from Oxidation by Ta Capping Layer', Coatings, Том. 13, № 5, 926. https://doi.org/10.3390/coatings13050926
Zhidkov, I. S., Kukharenko, A. I., Milyaev, M. A., Kravtsov, E. A., Makarova, M. V., Gapontsev, V. V., Streltsov, S. V., Cholakh, S. O., & Kurmaev, E. Z. (2023). Protection of Cu from Oxidation by Ta Capping Layer. Coatings, 13(5), [926]. https://doi.org/10.3390/coatings13050926 2079-6412 Final All Open Access, Gold https://www.scopus.com/inward/record.uri?eid=2-s2.0-85160399581&doi=10.3390%2fcoatings13050926&partnerID=40&md5=355effa020abe5a3172169655fb8cb2a https://www.mdpi.com/2079-6412/13/5/926/pdf?version=1684145932 http://elar.urfu.ru/handle/10995/130519 10.3390/coatings13050926 85160399581 000997090100001 |
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| Язык |
en
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| Права |
Open access (info:eu-repo/semantics/openAccess)
cc-by https://creativecommons.org/licenses/by/4.0/ |
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| Формат |
application/pdf
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| Издатель |
MDPI
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| Источник |
Coatings
Coatings |
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