Analysis of work and efficiency increase of of the ILUR-03 installation magnetron system for tubular specimens outer surface modification
Электронный архив ТПУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
| Заглавие |
Analysis of work and efficiency increase of of the ILUR-03 installation magnetron system for tubular specimens outer surface modification
|
|
| Автор |
Kalin, B. A.
Volkov, N. V. Valikov, R. A. Yashin, A. S. Krivobokov, Valery Pavlovich Yanin, Sergey Nikolaevich Yuriev, Yuri Nikolaevich |
|
| Тематика |
эффективность
установки магнетронные системы наружные поверхности трубчатые образцы легирование металлы ионно-лучевая обработка магнетроны пленки циркониевые сплавы адгезия |
|
| Описание |
The method of material near-surface layers doping by mixing of alloying elements films with ion beam is widely used in science and technology. Three magnetrons with independent power systems, integrated in installation for ion-beam treatment of long-range products ILUR-03, were used as deposition systems. Targets for magnetrons were in the form of disks 60 mm diameter and 5 mm thickness and consisted of the following elements: Al, Fe, Mo, Zr, Cr of purity better than 99.99 at.%. Deposition was performed in argon atmosphere at 1-5 Pa pressure and room temperature in stable current mode at 30-100 mA. Analysis of the obtained films on the surface of cylindrical specimens from zirconium alloys with the outer diameter of 9.15 mm showed high uniformity of coating on length of 300 mm, good adhesion and absence of discontinuities in the films body.
|
|
| Дата |
2017-06-08T04:19:05Z
2017-06-08T04:19:05Z 2017 |
|
| Тип |
Conference Paper
Published version (info:eu-repo/semantics/publishedVersion) Conference paper (info:eu-repo/semantics/conferencePaper) |
|
| Идентификатор |
Analysis of work and efficiency increase of of the ILUR-03 installation magnetron system for tubular specimens outer surface modification / B. A. Kalin [et al.] // Journal of Physics: Conference Series. — 2017. — Vol. 830 : Energy Fluxes and Radiation Effects 2016 : 5th International Congress, 2–7 October 2016, Tomsk, Russian Federation : [materials]. — [012058, 4 p.].
http://earchive.tpu.ru/handle/11683/39483 10.1088/1742-6596/830/1/012058 |
|
| Язык |
en
|
|
| Связанные ресурсы |
Journal of Physics: Conference Series. Vol. 830 : Energy Fluxes and Radiation Effects 2016. — Bristol, 2017.
|
|
| Права |
Open access (info:eu-repo/semantics/openAccess)
|
|
| Издатель |
IOP Publishing
|
|