The influence of repetitively pulsed plasma immersion low energy ion implantation on TiN coating formation and properties
Электронный архив ТПУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
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The influence of repetitively pulsed plasma immersion low energy ion implantation on TiN coating formation and properties
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| Автор |
Sivin, Denis Olegovich
Ananjin, Petr Semenovich Dektyarev, Sergey Valentinovich Ryabchikov, Aleksandr Ilyich Shevelev, Aleksey Eduardovich |
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| Тематика |
имплантанты
покрытия ионная имплантация импульсная плазма нитрид титана газоразрядная плазма катоды адгезия прочность трибологические свойства морфология поверхности |
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| Описание |
Application of high frequency short pulse plasma immersion low energy ion implantation for titanium nitride coating deposition using vacuum arc metal plasma and hot-cathode gas-discharge plasma on R6M5 alloy was investigated. Implementation of negative repetitively pulsed bias with bias amplitude 2 kV, pulse duration 5 [mu]s and pulse frequency 105 Hz leads to 6.2-fold decrease of vacuum arc macroparticle surface density for macroparticles with diameter less than 0.5 [mu]m. Ion sputtering due coating deposition reduces the production rate approximately by 30%. It was found that with bias amplitude range from 1.1 to 1.4 kV and pulse duration 5 [mu]s yields to formation of coatings with local hardness up to 40 GPa. This paper presents the results of experimental studies of adhesion strength, tribological properties and surface morphology of deposited TiN coatings.
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| Дата |
2017-06-08T04:19:08Z
2017-06-08T04:19:08Z 2017 |
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| Тип |
Conference Paper
Published version (info:eu-repo/semantics/publishedVersion) Conference paper (info:eu-repo/semantics/conferencePaper) |
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| Идентификатор |
The influence of repetitively pulsed plasma immersion low energy ion implantation on TiN coating formation and properties / D. O. Sivin [et al.] // Journal of Physics: Conference Series. — 2017. — Vol. 830 : Energy Fluxes and Radiation Effects 2016 : 5th International Congress, 2–7 October 2016, Tomsk, Russian Federation : [materials]. — [012103, 6 p.].
http://earchive.tpu.ru/handle/11683/39489 10.1088/1742-6596/830/1/012103 |
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en
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| Связанные ресурсы |
Journal of Physics: Conference Series. Vol. 830 : Energy Fluxes and Radiation Effects 2016. — Bristol, 2017.
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| Права |
Open access (info:eu-repo/semantics/openAccess)
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IOP Publishing
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