The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode
Электронный архив ТПУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
| Заглавие |
The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode
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| Автор |
Linnik, Stepan Andreevich
Gaydaychuk, Alexander Valerievich Okhotnikov, Vitaly Vladimirovich |
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| Тематика |
алмазные покрытия
плазма тлеющие разряды импульсно-периодический режим алмазные пленки фазовый состав микроструктуры |
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| Описание |
We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries.
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| Дата |
2017-06-08T04:19:12Z
2017-06-08T04:19:12Z 2017 |
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| Тип |
Conference Paper
Published version (info:eu-repo/semantics/publishedVersion) Conference paper (info:eu-repo/semantics/conferencePaper) |
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| Идентификатор |
Linnik S. A. The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode / S. A. Linnik, A. V. Gaydaychuk, V. V. Okhotnikov // Journal of Physics: Conference Series. — 2017. — Vol. 830 : Energy Fluxes and Radiation Effects 2016 : 5th International Congress, 2–7 October 2016, Tomsk, Russian Federation : [materials]. — [012118, 5 p.].
http://earchive.tpu.ru/handle/11683/39496 10.1088/1742-6596/830/1/012118 |
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| Язык |
en
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| Связанные ресурсы |
Journal of Physics: Conference Series. Vol. 830 : Energy Fluxes and Radiation Effects 2016. — Bristol, 2017.
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| Права |
Open access (info:eu-repo/semantics/openAccess)
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| Издатель |
IOP Publishing
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