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Liga method of forming high-contrast collimators and anti-scatter grids with high aspect ratio

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Поле Значение
 
Заглавие Liga method of forming high-contrast collimators and anti-scatter grids with high aspect ratio
 
Автор Goldenberg, B.G.
Lemzyakov, A.G.
Nazmov, V.P
Palchikov, E.I
 
Тематика X-Ray
imaging
рентгеновская литография
изображения
микрофокусная рентгеноскопия
трубки
 
Описание The article deals with creation and application of high-contrast anti-scatter X-ray grids for X-ray imaging in the range of 20–200 keV from microfocus X-ray tubes. A prototype high-aspect-ratio nickel grid structure is used to consider the impact of anti-scatter grid on the directional patterns of the IMA-2-150D X-ray tube. The suppression of scattered radiation and narrowing of the directional radiation pattern are demonstrated. The contrast of the nickel prototype is apparently insuffi cient. The article presents LIGA methods for manufacturing anti-scatter X-ray grids made of gold in Siberian Synchrotron and Terahertz Radiation Centre. A method for forming resistive grid structures using deep X-ray lithography is described and test structures are shown. The development of manufacturing technology for anti-scatter X-ray grids is in progress.
 
Дата 2018-10-29T02:40:37Z
2018-10-29T02:40:37Z
2018
 
Тип Article
Published version (info:eu-repo/semantics/publishedVersion)
Journal article (info:eu-repo/semantics/article)
 
Идентификатор Liga method of forming high-contrast collimators and anti-scatter grids with high aspect ratio / B.G. Goldenberg [и др.] // Resource-Efficient Technologies. — 2018. — № 2. — [P. 1-4].
2405-6537
http://earchive.tpu.ru/handle/11683/51439
10.18799/24056537/2018/2/186
 
Язык en
 
Связанные ресурсы Resource-Efficient Technologies. 2018. № 2
 
Права Open access (info:eu-repo/semantics/openAccess)
 
Формат application/pdf
 
Издатель Томский политехнический университет
 
Источник Resource-Efficient Technologies