Comparison of glow, arc, and magnetron direct current discharges
Электронный архив ТПУ
Информация об архиве | Просмотр оригинала| Поле | Значение | |
| Заглавие |
Comparison of glow, arc, and magnetron direct current discharges
|
|
| Автор |
Abrahamyan, A. S.
Mkrtchyan, A. H. Chilingaryan, R. Yu. |
|
| Тематика |
glow discharge
arc discharge magnetron discharge direct current |
|
| Описание |
Glow discharge (GD) in a tube, arc discharge (AD) without cathode heating from an external source, and magnetron discharge (MD) in a planar magnetron are compared. In each of the discharges, characteristic areas are distinguished. In MD, electrons trapped in the near-cathode region are not directly involved in ionization processes, but “wake” acceleration of slow ions by electrons that move along Larmor orbits is possible, which gives additional energy to ions moving toward the cathode. In GD in the near-cathode region, the average energy of the ejected electrons is on the order of several electron volts, and the energy of the ions and neutrals is less than 0.1 eV. In MD in the near-cathode region, the average energy of knocked-out electrons, ions, and neutrals is on the order of tens of electron volts. The differential resistance of GD is negative, that of AD is usually negative, and that of MD is positive. The energy of ions in the magnetron plasma can be greater than that of electrons, which gives new possibilities for acoustoplasma control of MD and the creation of appropriate instruments and devices.
|
|
| Дата |
2019-08-27T10:17:24Z
2019-08-27T10:17:24Z 2019 |
|
| Тип |
Article
Published version (info:eu-repo/semantics/publishedVersion) Journal article (info:eu-repo/semantics/article) |
|
| Идентификатор |
Abrahamyan A. S. Comparison of glow, arc, and magnetron direct current discharges / A. S. Abrahamyan, A. H. Mkrtchyan, R. Yu. Chilingaryan // Resource-Efficient Technologies. — 2019. — № 2. — [P. 29-35].
2405-6537 http://earchive.tpu.ru/handle/11683/55701 10.18799/24056537/2019/2/237 |
|
| Язык |
en
|
|
| Связанные ресурсы |
Resource-Efficient Technologies. 2019. № 2
|
|
| Права |
Open access (info:eu-repo/semantics/openAccess)
|
|
| Формат |
application/pdf
|
|
| Издатель |
Томский политехнический университет
|
|
| Источник |
Resource-Efficient Technologies
|
|